IEEE Transactions on Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing  
Abbreviated title (ISO 4)
IEEE Trans. Semicond. Manuf.
Discipline Semiconductor device fabrication
Language English
Edited by Anthony Muscat
Publication details
Publisher
Publication history
1988–present
Frequency Quarterly
0.977
Indexing
ISSN 0894-6507 (print)
1558-2345 (web)
LCCN 88659341
OCLC no. 16152423
Links

The IEEE Transactions on Semiconductor Manufacturing is a quarterly peer-reviewed scientific journal published by the IEEE Computer Society. It covers research on semiconductor device fabrication, including simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, and manufacturability improvement. The editor-in-chief is Anthony Muscat (University of Arizona). According to the Journal Citation Reports, the journal has a 2013 impact factor of 0.977.[1]

The journal is a joint publication of the

References

  1. "IEEE Transactions on Semiconductor Manufacturing". 2013 Journal Citation Reports. Web of Science (Science ed.). Thomson Reuters. 2014.

External links

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