Tetrakis(trimethylsilyloxy)silane
 | |
| Identifiers | |
|---|---|
| 3555-47-3 | |
| Abbreviations | TTMS |
| Properties | |
| C12H36O4Si5 | |
| Molar mass | 384.84 g·mol−1 |
| Appearance | Colourless liquid |
| Density | 0.87 g cm−3[1] |
| Melting point | −60 °C (−76 °F; 213 K) |
| Boiling point | 103–106 °C (217–223 °F; 376–379 K) |
| Vapor pressure | 8.96 Pa (25°C) |
| Refractive index (nD) |
1.389 |
| Hazards | |
| EU classification (DSD) |
 Xi |
| Related compounds | |
| Related compounds |
Hexamethyldisiloxane |
| Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). | |
 verify (what is  ?) | |
| Infobox references | |
Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound with the formula Si[OSi(CH3)3]4. This colourless liquid is used as a reagent in organic synthesis.[2]
Application
TTMS can be used for thin film coating with a nanostructured silicon dioxide prepared by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure.[3]
References
- ↑ "Chemical Book".
- ↑ Fleming, I (2002). Science of Synthesis: Houben-Weyl Methods of Molecular Transformations. Stuttgart: Georg Thieme Verlag. p. 1060. ISBN 3-13-112171-8.
- ↑ Schäfer, J; Hnilica, J; Sperka, J; Quade, A; Kudrle, V; Foest, R; Vodak, J; Zajickova, L (2016). "Tetrakis(trimethylsilyloxy)silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure". Surface & Coatings Technology (295): 112–118. doi:10.1016/j.surfcoat.2015.09.047. Retrieved 2015-10-10.
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